/* This is for HP's CMOS26B 1.0 micron CMOS Bulk Process. All parameters are defined based on HP's general process specifications (GPP). Sidewall fringing was taken from Ersatco fictitious process (johnson,jouppi). Upwards fringe caps (eg poly-->m1, poly-->m2) are computed by the program scaleCap by using the Skurai/Tamaru formula based on the known capacitances. */ #ifdef extForSpice style lambdaSp=0.5 #else style lambda=0.5 #endif lambda 50 step 100 sidehalo 8 /* 2 more than min m3 spacing */ #ifdef INCLUDE_FET_CAP /* Normally off since neither spice or irsim need it */ areacap allFet 692 /* af/lambda^2 */ #endif /* ------------ diff capacitances ---------------- */ areacap nwell 40 perimc nwell ~(nwell) 100 #ifdef extForSpice areacap (ndiff,nsd,ndc,nsc)/a 0 perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0 areacap (pdiff,psd,pdc,psc)/a 0 perimc (pdiff,psd,pdc,psc)/a space,nwell 0 #else /* Real perim values increased a little to compensate for not counting CJGATE */ areacap (ndiff,nsd,ndc,nsc)/a 40 perimc (ndiff,nsd,ndc,nsc)/a space,pwell 300 /* 250 */ areacap (pdiff,psd,pdc,psc)/a 170 perimc (pdiff,psd,pdc,psc)/a space,nwell 200 /* 160 */ #endif /* ------------------------------------------------------ */ /* ------------ poly capacitances ---------------- */ areacap PolyCap 15 overlap PolyCap allWell 15 perimc PolyCap ~PolyCap 22 sideOverlap(PolyCap, ~PolyCap, allWell, 22, nothing) sideOverlap(PolyCap, ~PolyCap, M1Cap, 10, nothing) sideOverlap(PolyCap, ~PolyCap, M2Cap, 6, M1Cap) sideOverlap(PolyCap, ~PolyCap, M3Cap, 4, (M1Cap,M2Cap)) sidewall PolyCap ~PolyCap ~PolyCap PolyCap 11 /* ------------------------------------------------- */ /* ------------ metal1 capacitances ---------------- */ areacap M1Cap 8 overlap M1Cap allWell 8 PolyCap,PNplus overlap M1Cap PNplus 14 overlap M1Cap PolyCap 14 perimc M1Cap ~M1Cap 22 sideOverlap(M1Cap, ~M1Cap, allWell, 22, (PolyCap,PNplus)) sideOverlap(M1Cap, ~M1Cap, PNplus, 25, nothing) sideOverlap(M1Cap, ~M1Cap, PolyCap, 25, nothing) sideOverlap(M1Cap, ~M1Cap, M2Cap, 12, nothing) sideOverlap(M1Cap, ~M1Cap, M3Cap, 7, M2Cap) sidewall M1Cap ~M1Cap ~M1Cap M1Cap 27 /* ------------------------------------------------- */ /* ------------ metal2 capacitances ---------------- */ areacap M2Cap 4 overlap M2Cap allWell 4 PolyCap,M1Cap,PNplus overlap M2Cap PNplus 5 M1Cap overlap M2Cap PolyCap 6 M1Cap overlap M2Cap M1Cap 9 perimc M2Cap ~M2Cap 18 sideOverlap(M2Cap, ~M2Cap, allWell, 18, (M1Cap,PolyCap,PNplus) ) sideOverlap(M2Cap, ~M2Cap, PNplus, 19, M1Cap) sideOverlap(M2Cap, ~M2Cap, PolyCap, 20, M1Cap) sideOverlap(M2Cap, ~M2Cap, M1Cap, 23, nothing) sideOverlap(M2Cap, ~M2Cap, M3Cap, 10, nothing) sidewall M2Cap ~M2Cap ~M2Cap M2Cap 33 /* ------------------------------------------------- */ /* ------------ metal3 capacitances ---------------- */ areacap M3Cap 3 overlap M3Cap allWell 3 PolyCap,M1Cap,M2Cap,PNplus overlap M3Cap PNplus 3 M1Cap,M2Cap overlap M3Cap PolyCap 3 M1Cap,M2Cap overlap M3Cap M1Cap 4 M2Cap overlap M3Cap M2Cap 9 perimc M3Cap ~M3Cap 17 sideOverlap(M3Cap, ~M3Cap, allWell, 17, (PNplus,PolyCap,M1Cap,M2Cap)) sideOverlap(M3Cap, ~M3Cap, PNplus, 17, (M1Cap,M2Cap)) sideOverlap(M3Cap, ~M3Cap, PolyCap, 17, (M1Cap,M2Cap)) sideOverlap(M3Cap, ~M3Cap, M1Cap, 20, (M2Cap)) sideOverlap(M3Cap, ~M3Cap, M2Cap, 25, nothing) sidewall M3Cap ~M3Cap ~M3Cap M3Cap 50 /* ------------------------------------------------- */ /* -------------- Fets -----------------------------*/ /* cscab, cscap defined since extresis needs them */ fet pfet pdiff,pdc 2 pfet Vdd! nwell 204 450 fet nfet ndiff,ndc 2 nfet Gnd! pwell 150 450 /* These values are the equivalent resistance that irsim params for 3.3 V 125C though. Probably we want to make that 5V, 27C !!!! */ fetresis nfet linear 14100 /* resistance dyn L */ fetresis pfet linear 48100 /* resistance dyn H */ fetresis nfet saturation 14100 /* resistance dyn L */ fetresis pfet saturation 48100 /* resistance dyn H */ /* ------------------------------------------------- */ /* -------------- Resistivity (in milliohms per sq) -------*/ /* ---- assumed temp 85 C ----- */ resist NDRes 3800 resist PDRes 3800 resist PolyRes 5000 resist M1Res 81 resist M2Res 81 resist M3Res 34 resist nwell 1980000 contact pc 4 15000 contact ndc,pdc,nsc,psc 4 1500 contact m2c 4 500 contact m3c 4 500 /* ------------------------------------------------- */ /* Order the planes for correct shielding */ planeOrder(implant,0) planeOrder(well,1) planeOrder(active,2) planeOrder(metal1,3) planeOrder(metal2,4) planeOrder(metal3,5) planeOrder(oxide,6)