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Information and Telecommunication Technology Center (ITTC)

BibTeX


@Article{ Nordheden99Initiation,
author= "K.J. Nordheden",
title= "\{RIE Initiation Delay in BCI3/SF6/Ar Plasmas Due to Native Oxide Removal in NH4OH/H2O}",
journal= "\{Electrochemical Solid-State Letters}",
volume= "2",
number= "1",
pages= "43",
year= "1999"
}