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Information and Telecommunication Technology Center (ITTC)

BibTeX


@Article{ Abraham-Shrauner99Model,
author= "B. Abraham-Shrauner and K.J. Nordheden and Y.S. Lee",
title= "\{Model for Etch Depth Dependence on GaAs Via Hole Diameter}",
journal= "\{Journal of Vacuum Science Technology}",
volume= "17",
number= "3",
pages= "961",
year= "1999"
}